Growth of TiO2 thin films on Si(001) and SiO2 by reactive high power

Jón Tómas Guðmundsson; Friðrik Magnus; B. Agnarsson; A. S. Ingason; Kristjan Leosson; S. Olafsson

Growth of TiO2 thin films on Si(001) and SiO2 by reactive high power

Jón Tómas Guðmundsson
, Friðrik Magnus
, B. Agnarsson
, A. S. Ingason
, Kristjan Leosson
, S. Olafsson

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Journal	Materials Research Society Symposium - Proceedings
Publication status	Published - 2011

Access to Document

https://link.springer.com/article/10.1557/opl.2011.1010

Cite this

@article{1a268d9f014c4664a02e9c8fafe4a827,

title = "Growth of TiO2 thin films on Si(001) and SiO2 by reactive high power",

author = "Gu{\dh}mundsson, \{J{\'o}n T{\'o}mas\} and Fri{\dh}rik Magnus and B. Agnarsson and Ingason, \{A. S.\} and Kristjan Leosson and S. Olafsson",

year = "2011",

language = "English",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}

TY - JOUR

T1 - Growth of TiO2 thin films on Si(001) and SiO2 by reactive high power

AU - Guðmundsson, Jón Tómas

AU - Magnus, Friðrik

AU - Agnarsson, B.

AU - Ingason, A. S.

AU - Leosson, Kristjan

AU - Olafsson, S.

PY - 2011

Y1 - 2011

M3 - Conference article

SN - 0272-9172

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -