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Insights into the copper HiPIMS discharge: deposition rate and ionised flux fraction

  • J. Fischer
  • , M. Renner
  • , J. T. Gudmundsson
  • , M. Rudolph
  • , H. Hajihoseini
  • , N. Brenning
  • , D. Lundin

University of Iceland

Research output: Contribution to journal › Article › peer-review

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