| Original language | English |
|---|---|
| Journal | Selective and Functional Film Deposition Techniques |
| Publication status | Published - 2000 |
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Ionized Metal Deposition for Front-end Matallization of IC's; High Power Pulsed Magnetron Sputtering
- Jón Tómas Guðmundsson
- , U. Helmersson
- , J. Alami
- , Z. Kahn
Research output: Contribution to journal › Article › peer-review