Abstract
The electron energy distribution function (EEDF) and plasma parameters in a planar dc magnetron sputtering discharge in argon and krypton were determined using a Langmuir probe. Two groups of electrons are observed in the discharge. The electron temperature of the cold electrons is roughly independent of the discharge pressure, while the electron temperature of the hot electrons decreases with increased discharge pressure. The electron density increases with increased pressure and is roughly a factor of 2-3 higher for a krypton discharge than for an argon discharge.
| Original language | English |
|---|---|
| Article number | 062018 |
| Journal | Journal of Physics: Conference Series |
| Volume | 100 |
| Issue number | Part 6 |
| DOIs | |
| Publication status | Published - 27 Mar 2008 |
| Event | 17th International Vacuum Congress, IVC 2007, 13th International Conference on Surface Science, ICSS 2007 and International Conference on Nanoscience and Technology, ICN+T 2007 - Stockholm, Sweden Duration: 2 Jul 2007 → 6 Jul 2007 |
Bibliographical note
Publisher Copyright: © 2008 IOP Publishing Ltd.Fingerprint
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