Preface to Special Topic: Reactive high power impulse magnetron sputtering

Research output: Contribution to journal › Review article › peer-review

Access to Document

@article{b7ac752df8264871a58cd65139612522,

title = "Preface to Special Topic: Reactive high power impulse magnetron sputtering",

author = "A. Hecimovic and Gudmundsson, \{J. T.\}",

year = "2017",

month = may,

day = "7",

doi = "10.1063/1.4979270",

language = "English",

volume = "121",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "17",

}

TY - JOUR

T1 - Preface to Special Topic

T2 - Reactive high power impulse magnetron sputtering

AU - Hecimovic, A.

AU - Gudmundsson, J. T.

PY - 2017/5/7

Y1 - 2017/5/7

UR - https://www.scopus.com/pages/publications/85016409981

U2 - 10.1063/1.4979270

DO - 10.1063/1.4979270

M3 - Review article

SN - 0021-8979

VL - 121

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 17

M1 - 171801

ER -