Reduction in the density of interface states at the SiO2/4H-SiC interface after dry oxidation in the presence of potassium

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Abstract

We report a strong reduction in the density of near-interface traps (NITs) at the SiO2/4H-SiC interface after dry oxidation in the presence of potassium. This is accompanied by a significant enhancement of the oxidation rate. The results are in line with recent investigations of the effect of sodium on oxidation of 4H-SiC. It is evident that both alkali metals enhance the oxidation rate of SiC and strongly influence the energy distribution of interface states.

Original languageEnglish
Title of host publicationSilicon Carbide and Related Materials 2010
EditorsEdouard V. Monakhov, Tamas Hornos, Bengt G. Svensson
PublisherTrans Tech Publications Ltd
Pages334-337
Number of pages4
ISBN (Print)9783037850794
DOIs
Publication statusPublished - 2011

Publication series

NameMaterials Science Forum
Volume679-680

Other keywords

  • Alkali metal
  • Interface state
  • Oxidation
  • SiC

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