Tuning metal-insulator transitions in epitaxial V2O3 thin films

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Abstract

We present a study of the synthesis of epitaxial V2O3 films on c-plane Al2O3 substrates by reactive dc-magnetron sputtering. The results reveal a temperature window, at substantially lower values than previously reported, wherein epitaxial films can be obtained when deposited on [0001] oriented surfaces. The films display a metal-insulator transition with a change in the resistance of up to four orders of magnitude, strongly dependent on the O2 partial pressure during deposition. While the electronic properties of the films show sensitivity to the amount of O2 present during deposition of the films, their crystallographic structure and surface morphology of atomically flat terraced structures with up to micrometer dimensions are maintained. The transition temperature, as well as the scale of the metal-insulator transition, is correlated with the stoichiometry and local strain in the films controllable by the deposition parameters.

Original languageEnglish
Article number161902
JournalApplied Physics Letters
Volume112
Issue number16
DOIs
Publication statusPublished - 16 Apr 2018

Bibliographical note

Funding Information: This work was supported by funding from the Icelandic Research Fund Grant Nos. 141518-051 and 152483-051 and the University of Iceland Research fund. The authors acknowledge discussions with Arni S. Ingason. Publisher Copyright: © 2018 Author(s).

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